Inventor
KAWAHIGASHI FUMIO
JP4 patents
Patents
4 patentsUS6702892B2Mar 9, 2004
Production device for high-quality silicon single crystals
SUMITOMO MITSUBISHI SILICON19 citations82
US6767400B2Jul 27, 2004
Crystal growth method
SUMITOMO MITSUBISHI SILICON7 citations71
US6740160B2May 25, 2004
Crystal growing apparatus
SUMITOMO MITSUBISHI SILICON4 citations57
US6764547B2Jul 20, 2004
Crystal growth apparatus
SUMITOMO MITSUBISHI SILICON0 citations47