Inventor

FUNG MIN-SU

US8 patents

⚠️ This page may combine multiple inventors who share the name “FUNG MIN-SU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IBM

4 patents

US4812756AMar 14, 1989

Contactless technique for semicondutor wafer testing

IBM220 citations98

US5498974AMar 12, 1996

Contactless corona-oxide-semiconductor Q-V mobile charge measurement method and apparatus

IBM81 citations95

US5650731AJul 22, 1997

Photovoltaic oxide charge measurement probe technique

IBM96 citations92

US6136669AOct 24, 2000

Mobile charge immune process

IBM10 citations65

(unassigned)

2 patents

US6771092B1Aug 3, 2004

Non-contact mobile charge measurement with leakage band-bending and dipole correction

US6937050B1Aug 30, 2005

Non-contact mobile charge measurement with leakage band-bending and dipole correction

KEITHLEY INSTRUMENTS

1 patent

US6522158B1Feb 18, 2003

Non-contact mobile charge measurement with leakage band-bending and dipole correction

KEITHLEY INSTRUMENTS25 citations92

KLA TENCOR CORP

1 patent

US7230443B1Jun 12, 2007

Non-contact mobile charge measurement with leakage band-bending and dipole correction

KLA TENCOR CORP14 citations83