Inventor
SATO TATSUYA E
US10 patents
⚠️ This page may combine multiple inventors who share the name “SATO TATSUYA E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
7 patentsUS9698009B2Jul 4, 2017
Atomic layer deposition of films using spatially separated injector chamber
APPLIED MATERIALS INC12 citations77
US10872763B2Dec 22, 2020
Treatments to enhance material structures
APPLIED MATERIALS INC5 citations71
US9960275B1May 1, 2018
Method of fabricating air-gap spacer for N7/N5 finFET and beyond
APPLIED MATERIALS INC2 citations71
US12110589B2Oct 8, 2024
Methods for metal oxide post-treatment
APPLIED MATERIALS INC0 citations62
US11015246B2May 25, 2021
Apparatus and methods for depositing ALD films with enhanced chemical exchange
APPLIED MATERIALS INC0 citations60
US12018363B2Jun 25, 2024
Gap-fill with aluminum-containing films
APPLIED MATERIALS INC0 citations51
US11370669B2Jun 28, 2022
Amorphous silicon doped yttrium oxide films and methods of formation
APPLIED MATERIALS INC0 citations51
SATO TATSUYA E
3 patentsUS8778816B2Jul 15, 2014
In situ vapor phase surface activation of SiO2
SATO TATSUYA E9 citations82
US8633119B2Jan 21, 2014
Methods for manufacturing high dielectric constant films
SATO TATSUYA E3 citations60
US8633114B2Jan 21, 2014
Methods for manufacturing high dielectric constant films
SATO TATSUYA E0 citations49