Inventor
FELDNER KLAUS
DE8 patents
⚠️ This page may combine multiple inventors who share the name “FELDNER KLAUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SIEMENS AG
4 patentsUS5840625ANov 24, 1998
Method of fabricating integrated circuit interconnection employing tungsten/aluminum layers
SIEMENS AG44 citations94
US6300235B1Oct 9, 2001
Method of forming multi-level coplanar metal/insulator films using dual damascene with sacrificial flowable oxide
SIEMENS AG48 citations90
US6016008AJan 18, 2000
Integrated circuit interconnection employing tungsten/aluminum layers
SIEMENS AG17 citations90
US5822875AOct 20, 1998
Scanning electron microscopic ruler and method
SIEMENS AG16 citations71
INFINEON TECHNOLOGIES AG
3 patentsUS6753236B2Jun 22, 2004
Method for planarizing an isolating layer
INFINEON TECHNOLOGIES AG7 citations71
US6638814B1Oct 28, 2003
Method for producing an insulation
INFINEON TECHNOLOGIES AG5 citations61
US7008849B2Mar 7, 2006
Method for providing bitline contacts in a memory cell array and a memory cell array having bitline contacts
INFINEON TECHNOLOGIES AG0 citations47