Inventor
HUANG CHEN-YEN
TW5 patents
⚠️ This page may combine multiple inventors who share the name “HUANG CHEN-YEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
3 patentsUS9442392B2Sep 13, 2016
Scanner overlay correction system and method
TAIWAN SEMICONDUCTOR MFG CO LTD10 citations82
US9733577B2Aug 15, 2017
Intra-field process control for lithography
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US9588446B2Mar 7, 2017
Calibration apparatus and an adjustment method for a lithography apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations37