Inventor

HUIJBERTS ALEXANDER MARINUS ARNOLDUS

NL4 patents

⚠️ This page may combine multiple inventors who share the name “HUIJBERTS ALEXANDER MARINUS ARNOLDUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

2 patents

US9606445B2Mar 28, 2017

Lithographic apparatus and method of manufacturing a device

ASML NETHERLANDS BV5 citations68

US11681233B2Jun 20, 2023

Gas mixing for fast temperature control of a cooling hood

ASML NETHERLANDS BV0 citations53

NIENHUYS HAN-KWANG

2 patents

US8970818B2Mar 3, 2015

Lithographic apparatus and component with repeating structure having increased thermal accommodation coefficient

NIENHUYS HAN-KWANG5 citations68

US8625068B2Jan 7, 2014

Lithographic apparatus configured to suppress contamination from passing into the projection system and method

NIENHUYS HAN-KWANG1 citations47