Inventor
LAI CHI-TUNG
TW8 patents
Patents
8 patentsUS12448271B2Oct 21, 2025
Liquid supply system and liquid preparation method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US11834322B2Dec 5, 2023
Liquid supply system and liquid preparation method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US12343841B2Jul 1, 2025
High-throughput, precise semiconductor slurry blending tool
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US12341026B2Jun 24, 2025
Chemical dispensing system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US11858086B2Jan 2, 2024
High-throughput, precise semiconductor slurry blending tool
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US11817329B2Nov 14, 2023
Chemical dispensing system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US10814455B2Oct 27, 2020
Slurry feed system and method of providing slurry to chemical mechanical planarization station
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US9744642B2Aug 29, 2017
Slurry feed system and method of providing slurry to chemical mechanical planarization station
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48