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Inventor
ASO TSUYOSHI
JP
3 patents
⚠️ This page may combine multiple inventors who share the name “ASO TSUYOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
OKI ELECTRIC IND CO LTD
1 patent
US5151768A
Sep 29, 1992
Dielectric isolation substrate
OKI ELECTRIC IND CO LTD
7 citations
66
ASO TSUYOSHI
1 patent
US8574447B2
Nov 5, 2013
Inorganic rapid alternating process for silicon etch
ASO TSUYOSHI
2 citations
52
LAM RES CORP
1 patent
US7226869B2
Jun 5, 2007
Methods for protecting silicon or silicon carbide electrode surfaces from morphological modification during plasma etch processing
LAM RES CORP
1 citations
46