Inventor
JONES HARRIS C
US7 patents
Patents
7 patentsUS6140217AOct 31, 2000
Technique for extending the limits of photolithography
IBM77 citations95
US5284549AFeb 8, 1994
Selective fluorocarbon-based RIE process utilizing a nitrogen additive
IBM36 citations91
US6492259B2Dec 10, 2002
Process for making a planar integrated circuit interconnect
IBM18 citations90
US6281583B1Aug 28, 2001
Planar integrated circuit interconnect
IBM17 citations90
US6337516B1Jan 8, 2002
Technique for extending the limits of photolithography
IBM7 citations73
US6440813B2Aug 27, 2002
Process of manufacturing a DRAM cell capacitor having increased trench capacitance
IBM6 citations72
US6188096B1Feb 13, 2001
DRAM cell capacitor having increased trench capacitance
IBM13 citations72