Inventor
LALLEMANT NICOLAS ALBAN
NL7 patents
⚠️ This page may combine multiple inventors who share the name “LALLEMANT NICOLAS ALBAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
6 patentsUS7271917B2Sep 18, 2007
Lithographic apparatus, position quantity detection system and method
ASML NETHERLANDS BV9 citations65
US7557903B2Jul 7, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV4 citations57
US7271873B2Sep 18, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations56
US7072021B2Jul 4, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations55
US8045134B2Oct 25, 2011
Lithographic apparatus, control system and device manufacturing method
ASML NETHERLANDS BV0 citations51
US10268128B2Apr 23, 2019
Lithographic apparatus
ASML NETHERLANDS BV0 citations32