Inventor

TSUMAGARI KANAKO

JP3 patents

⚠️ This page may combine multiple inventors who share the name “TSUMAGARI KANAKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ULVAC INC

2 patents

US8367542B2Feb 5, 2013

Semiconductor device manufacturing method and semiconductor device manufacturing apparatus

ULVAC INC6 citations81

US8043963B2Oct 25, 2011

Semiconductor device manufacturing method and semiconductor device manufacturing apparatus

ULVAC INC0 citations49

HATANAKA MASANOBU

1 patent

US8084368B2Dec 27, 2011

Method of forming barrier film

HATANAKA MASANOBU5 citations58