Inventor

URBAN JENS

DE2 patents

Patents

2 patents

US7951721B2May 31, 2011

Etching technique for creation of thermally-isolated microstructures

LANDSBERGER LESLIE M2 citations57

US8969203B2Mar 3, 2015

Etching technique for creation of thermally-isolated microstructures

LANDSBERGER LESLIE M0 citations47