Inventor
KADEN DIRK
DE2 patents
Patents
2 patentsUS11744158B2Aug 29, 2023
Ferroelectric material, MEMS component comprising a ferroelectric material, MEMS device comprising a first MEMS component, method of producing a MEMS component, and method of producing a CMOS-compatible MEMS component
FRAUNHOFER GES FORSCHUNG0 citations53
US10095023B2Oct 9, 2018
Apparatus comprising a spring and an optical element suspended thereon
FRAUNHOFER GES FORSCHUNG0 citations27