Inventor

WU HSUEH-HSIEN

TW5 patents

Patents

5 patents

USD990538SJun 27, 2023

Miniaturized semiconductor manufacturing device

SYSKEY TECH CO LTD3 citations67

US12288701B2Apr 29, 2025

Multi-chamber semiconductor manufacturing system

SYSKEY TECH CO LTD0 citations57

USD1049066SOct 29, 2024

Base for a multi-chamber semiconductor

SYSKEY TECH CO LTD0 citations57

US11976358B2May 7, 2024

Atomic layer deposition system

SYSKEY TECH CO LTD0 citations47

US11817333B2Nov 14, 2023

Miniaturized semiconductor manufacturing system

SYSKEY TECH CO LTD0 citations46