Inventor

KOTHNUR PRASHANTH

US29 patents

⚠️ This page may combine multiple inventors who share the name “KOTHNUR PRASHANTH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KOTHNUR PRASHANTH

APPLIED MATERIALS INC

Apparatus and method for controlling a flow process material to a deposition chamber

Bipolar collimator utilized in a physical vapor deposition chamber

Showerhead for providing multiple materials to a process chamber

Magnetron assembly for physical vapor deposition chamber

Apparatus and method for controlling a flow process material to a deposition chamber

Methods of using a segmented showerhead for uniform delivery of multiple pre-cursors

Segmented showerhead for uniform delivery of multiple precursors

Deposition system with multi-cathode and method of manufacture thereof

Deposition system with multi-cathode and method of manufacture thereof

Methods for forming films on substrates

Apparatus for reducing tungsten resistivity

Methods for forming films on substrates

Deposition chamber showerhead

Plasma density control on substrate edge

Showerhead reflector

Methods and apparatus for reducing tungsten resistivity

EM source for enhanced plasma control

EM source for enhanced plasma control

Eco-efficiency (sustainability) dashboard for semiconductor manufacturing

Eco-efficiency (sustainability) dashboard for semiconductor manufacturing

Sputter source for semiconductor process chambers

Plasma density control on substrate edge

Apparatus for PVD dielectric deposition

Methods and apparatus for producing low angle depositions

Methods for shaping magnetic fields during semiconductor processing

Comprehensive modeling platform for manufacturing equipment

Virtual measurement of conditions proximate to a substrate with physics-informed compressed sensing

QIU HUATAN

Plasma generator systems and methods of forming plasma

GODET LUDOVIC

Bias voltage frequency controlled angular ion distribution in plasma processing