Inventor
BUCKLEY W D
US3 patents
Patents
3 patentsUS4579616AApr 1, 1986
Method of fabrication of an optically flat membrane
PERKIN ELMER CORP18 citations70
US4523974AJun 18, 1985
Method of fabricating a pellicle cover for projection printing system
PERKIN ELMER CORP8 citations69
US4465759AAug 14, 1984
Method of fabricating a pellicle cover for projection printing system
PERKIN ELMER CORP10 citations69