Inventor
WAKABAYASHI HIROMITSU
JP3 patents
Patents
3 patentsUS5658706AAug 19, 1997
Resist composition for forming a pattern comprising a pyridinium compound as an additive
TOSHIBA KK82 citations95
US5756254AMay 26, 1998
Resist, method of forming a resist pattern and manufacturing an electronic parts using the resist
TOSHIBA KK25 citations92
US5744281AApr 28, 1998
Resist composition for forming a pattern and method of forming a pattern wherein the composition 4-phenylpyridine as an additive
TOSHIBA KK34 citations92