Inventor
Kachel Krzysztof
BE8 patents
Patents
8 patentsUS10453701B2Oct 22, 2019
Deposition of organic films
ASM IP HOLDING BV55 citations98
US10923361B2Feb 16, 2021
Deposition of organic films
ASM IP HOLDING BV19 citations94
US10903113B2Jan 26, 2021
Selective deposition of aluminum and nitrogen containing material
ASM IP HOLDING BV16 citations93
US10553482B2Feb 4, 2020
Selective deposition of aluminum and nitrogen containing material
ASM IP HOLDING BV18 citations93
US10121699B2Nov 6, 2018
Selective deposition of aluminum and nitrogen containing material
ASM IP HOLDING BV23 citations93
US11728175B2Aug 15, 2023
Deposition of organic films
ASM IP HOLDING BV2 citations73
US12300505B2May 13, 2025
Deposition of organic films
ASM IP HOLDING BV0 citations62
US10928731B2Feb 23, 2021
Method of sequential infiltration synthesis treatment of infiltrateable material and structures and devices formed using same
ASM IP HOLDING BV0 citations51