Inventor
HOSHINO YUSUKE
JP7 patents
⚠️ This page may combine multiple inventors who share the name “HOSHINO YUSUKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
GIGAPHOTON INC
3 patentsUS11452196B2Sep 20, 2022
EUV chamber apparatus, extreme ultraviolet light generation system, and electronic device manufacturing method
GIGAPHOTON INC0 citations58
US11789374B2Oct 17, 2023
Extreme ultraviolet light generation apparatus and electronic device manufacturing method
GIGAPHOTON INC0 citations57
US12578656B2Mar 17, 2026
EUV light generation apparatus and electronic device manufacturing method
GIGAPHOTON INC0 citations49