Inventor
CHEN QIBIAO
US5 patents
⚠️ This page may combine multiple inventors who share the name “CHEN QIBIAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR TECH CORP
2 patentsUS7705331B1Apr 27, 2010
Methods and systems for providing illumination of a specimen for a process performed on the specimen
KLA TENCOR TECH CORP157 citations94
US7654715B1Feb 2, 2010
System and method for illuminating a specimen with uniform angular and spatial distribution
KLA TENCOR TECH CORP16 citations82