Inventor

HIRUMA KENTARO

JP2 patents

Patents

2 patents

US9966245B2May 8, 2018

Cooling apparatus, illumination optical system, exposure apparatus, and method of manufacturing article

CANON KK1 citations43

US9632423B2Apr 25, 2017

Illumination device, exposure apparatus, adjusting method, and method for manufacturing object

CANON KK0 citations39