Inventor
OSAKA NOBORU
JP10 patents
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CANON KK
9 patentsUS7602474B2Oct 13, 2009
Exposure apparatus
CANON KK4 citations61
US11255514B2Feb 22, 2022
Illumination apparatus having planar array of LEDs and movable pair of lens arrays for modifying light output
CANON KK1 citations51
US11698589B2Jul 11, 2023
Light source device, illuminating apparatus, exposing apparatus, and method for manufacturing article
CANON KK0 citations48
US11320741B2May 3, 2022
Light source apparatus, illumination apparatus, exposure apparatus, and method for manufacturing object
CANON KK0 citations48
US7843645B2Nov 30, 2010
Projection optical system, exposure apparatus, and method of manufacturing device
CANON KK0 citations48
US10761434B2Sep 1, 2020
Substrate holding apparatus, exposure apparatus, and article manufacturing method
CANON KK0 citations44
US9966245B2May 8, 2018
Cooling apparatus, illumination optical system, exposure apparatus, and method of manufacturing article
CANON KK1 citations43
US9632423B2Apr 25, 2017
Illumination device, exposure apparatus, adjusting method, and method for manufacturing object
CANON KK0 citations39
US10698319B2Jun 30, 2020
Exposure apparatus, exposure method, and article manufacturing method
CANON KK0 citations38