Inventor

HARRISON SARA E

US2 patents

Patents

2 patents

US9645262B2May 9, 2017

Capacitance reduction for pillar structured devices

L LIVERMORE NAT SECURITY LLC3 citations69

US11133190B2Sep 28, 2021

Metal-based passivation-assisted plasma etching of III-v semiconductors

L LIVERMORE NAT SECURITY LLC0 citations58