Inventor

KLAASSEN MICHEL FRANSOIS HUBERT

NL4 patents

⚠️ This page may combine multiple inventors who share the name “KLAASSEN MICHEL FRANSOIS HUBERT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

2 patents

US7538875B2May 26, 2009

Lithographic apparatus and methods for use thereof

ASML NETHERLANDS BV2 citations59

US7872731B2Jan 18, 2011

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV0 citations33

ZEISS CARL SMT AG

1 patent

US7952685B2May 31, 2011

Illuminator for a lithographic apparatus and method

ZEISS CARL SMT AG0 citations49

KLAASSEN MICHEL FRANSOIS HUBERT

1 patent

US8704199B2Apr 22, 2014

Alignment of collector device in lithographic apparatus

KLAASSEN MICHEL FRANSOIS HUBERT2 citations48