Inventor
XIONG JINGYI
US2 patents
Patents
2 patentsUS9097645B2Aug 4, 2015
Method and system for high speed height control of a substrate surface within a wafer inspection system
KLA TENCOR CORP4 citations64
US9810619B2Nov 7, 2017
Method and system for simultaneous tilt and height control of a substrate surface in an inspection system
KLA TENCOR CORP0 citations35