Inventor
HANAWA TETSURO
JP10 patents
⚠️ This page may combine multiple inventors who share the name “HANAWA TETSURO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI ELECTRIC CORP
7 patentsUS5429910AJul 4, 1995
Method of forming a critical resist pattern
MITSUBISHI ELECTRIC CORP27 citations91
US5328560AJul 12, 1994
Method of manufacturing semiconductor device
MITSUBISHI ELECTRIC CORP22 citations91
US5270796ADec 14, 1993
Apparatus for inspecting a phase shift mask
MITSUBISHI ELECTRIC CORP28 citations91
US6057066AMay 2, 2000
Method of producing photo mask
MITSUBISHI ELECTRIC CORP9 citations72
US5380889AJan 10, 1995
Method of forming resist pattern and organic silane compound for forming anti-relflection film for use in such method
MITSUBISHI ELECTRIC CORP14 citations72
US5512422AApr 30, 1996
Method of forming resist pattern and organic silane compound for forming anti-reflection film for use in such method
MITSUBISHI ELECTRIC CORP7 citations65
US5981146ANov 9, 1999
Resist coating film
MITSUBISHI ELECTRIC CORP6 citations59