P

Inventor

MATSUI SHUN

JP37 patents
⚠️ This page may combine multiple inventors who share the name “MATSUI SHUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KOKUSAI ELECTRIC CORP

23 patents
US10424520B1Sep 24, 2019

Method of manufacturing semiconductor device

KOKUSAI ELECTRIC CORP15 citations85
US10685832B1Jun 16, 2020

Substrate processing apparatus

KOKUSAI ELECTRIC CORP3 citations72
US10651068B1May 12, 2020

Method of manufacturing semiconductor device by setting process chamber to maintenance enable state

KOKUSAI ELECTRIC CORP1 citations72
US10453720B1Oct 22, 2019

Method of manufacturing semiconductor device

KOKUSAI ELECTRIC CORP3 citations72
US12165894B2Dec 10, 2024

Processing method, method of manufacturing semiconductor, and substrate processing apparatus

KOKUSAI ELECTRIC CORP0 citations62
US12093021B2Sep 17, 2024

Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium

KOKUSAI ELECTRIC CORP0 citations62
US11891697B2Feb 6, 2024

Substrate processing apparatus

KOKUSAI ELECTRIC CORP0 citations62
US11747789B2Sep 5, 2023

Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium

KOKUSAI ELECTRIC CORP0 citations62
US11749550B2Sep 5, 2023

Method of manufacturing semiconductor device by setting process chamber maintenance enable state

KOKUSAI ELECTRIC CORP0 citations62
US11355372B2Jun 7, 2022

Method of manufacturing semiconductor device by setting process chamber to maintenance enable state

KOKUSAI ELECTRIC CORP0 citations62
US11342212B2May 24, 2022

Method of manufacturing semiconductor device by setting process chamber maintenance enable state

KOKUSAI ELECTRIC CORP0 citations62
US11314234B2Apr 26, 2022

Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium

KOKUSAI ELECTRIC CORP0 citations62
US10978361B2Apr 13, 2021

Substrate processing apparatus and recording medium

KOKUSAI ELECTRIC CORP0 citations62
US10978310B2Apr 13, 2021

Method of manufacturing semiconductor device and non-transitory computer-readable recording medium capable of adjusting substrate temperature

KOKUSAI ELECTRIC CORP0 citations62
US10930533B2Feb 23, 2021

Substrate processing apparatus, substrate processing system and method of manufacturing semiconductor device

KOKUSAI ELECTRIC CORP0 citations62
US11289350B2Mar 29, 2022

Method of manufacturing semiconductor device

KOKUSAI ELECTRIC CORP1 citations61
US10984991B2Apr 20, 2021

Substrate processing apparatus

KOKUSAI ELECTRIC CORP1 citations61
US12567571B2Mar 3, 2026

Method of manufacturing semiconductor device

KOKUSAI ELECTRIC CORP0 citations52
US10541170B2Jan 21, 2020

Substrate processing apparatus and method of manufacturing semiconductor device

KOKUSAI ELECTRIC CORP0 citations52
US12392032B2Aug 19, 2025

Substrate processing apparatus with cleaning of exhaust system

KOKUSAI ELECTRIC CORP0 citations51
US11422528B2Aug 23, 2022

Substrate processing system, method of manufacturing semiconductor device, and recording medium

KOKUSAI ELECTRIC CORP0 citations51
US10503152B2Dec 10, 2019

Method of manufacturing semiconductor device

KOKUSAI ELECTRIC CORP0 citations42
US10714316B2Jul 14, 2020

Method of manufacturing semiconductor device

KOKUSAI ELECTRIC CORP0 citations41

HITACHI INT ELECTRIC INC

8 patents

CANON KK

6 patents