Inventor · disambiguated record
Hsiang-Ming Chang
Also filed as: CHANG HSIANG-MING
4 granted patents·4 pending applications·0 citations·filing 2021–2025
56Inventor score
Technology areasH10P
Top patents by PatentIndex Score
8 records- 0178US2025364333A1Critical dimension uniformity (cdu) control methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 0272US12482654B2System and method for multiple step directional patterningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Nov 25, 2025·0 cites·20 claims
- 0371US2024047209A1Method for fabricating semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Application pending·0 cites
- 0468US12476150B2Critical dimension uniformity (CDU) control method and semiconductor substrate processing systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Nov 18, 2025·0 cites·20 claims
- 0566US12354873B2System and method for multiple step directional patterningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Jul 8, 2025·0 cites·20 claims
- 0663US12027368B2Method for fabricating semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Jul 2, 2024·0 cites·20 claims
- 0761US2024395550A1Method for fabricating semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0847US2023049405A1Defect inspection system and method of using the sameTAIWAN SEMICONDUCTOR MFG CO LID·Filed 2022·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →