Inventor
OHKAWA YASUHARU
JP3 patents
Patents
3 patentsUS6722962B1Apr 20, 2004
Polishing system, polishing method, polishing pad, and method of forming polishing pad
SONY CORP35 citations90
US6139400AOct 31, 2000
Polishing system and method with polishing pad pressure adjustment
SONY CORP31 citations90
US6520835B1Feb 18, 2003
Polishing system, polishing method, polishing pad, and method of forming polishing pad
SONY CORP11 citations71