Inventor
SHIN EUN-HEE
KR6 patents
Patents
6 patentsUS6179955B1Jan 30, 2001
Dry etching apparatus for manufacturing semiconductor devices
SAMSUNG ELECTRONICS CO LTD344 citations98
US6251241B1Jun 26, 2001
Inductive-coupled plasma apparatus employing shield and method for manufacturing the shield
SAMSUNG ELECTRONICS CO LTD18 citations91
US6146492ANov 14, 2000
Plasma process apparatus with in situ monitoring, monitoring method, and in situ residue cleaning method
SAMSUNG ELECTRONICS CO LTD41 citations90
US6335284B1Jan 1, 2002
Metallization process for manufacturing semiconductor devices
SAMSUNG ELECTRONICS CO LTD16 citations80
US6499492B1Dec 31, 2002
Plasma process apparatus with in situ monitoring, monitoring method, and in situ residue cleaning
SAMSUNG ELECTRONICS CO LTD10 citations71
US6585907B2Jul 1, 2003
Method for manufacturing a shield for an inductively-couple plasma apparatus
SAMSUNG ELECTRONICS CO LTD0 citations51