Inventor
TACHI TOSHIAKI
JP4 patents
Patents
4 patentsUS6730769B2May 4, 2004
Novolak resin, production process thereof and positive photoresist composition using the novolak resin
TOKYO OHKA KOGYO CO LTD3 citations58
US6630279B2Oct 7, 2003
Positive photoresist composition
TOKYO OHKA KOGYO CO LTD0 citations48
US9244354B2Jan 26, 2016
Method for producing thick film photoresist pattern
TOKYO OHKA KOGYO CO LTD1 citations47
US6680155B2Jan 20, 2004
Positive photoresist composition
TOKYO OHKA KOGYO CO LTD0 citations38