Inventor
SUN CHENG I
TW6 patents
⚠️ This page may combine multiple inventors who share the name “SUN CHENG I”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
5 patentsUS7751908B2Jul 6, 2010
Method and system for thermal process control
TAIWAN SEMICONDUCTOR MFG8 citations78
US6898471B1May 24, 2005
Multivariate RBR tool aging adjuster
TAIWAN SEMICONDUCTOR MFG12 citations75
US7043327B2May 9, 2006
Lithography apparatus and method employing non-environmental variable correction
TAIWAN SEMICONDUCTOR MFG6 citations61
US6993407B2Jan 31, 2006
Method and system for analyzing semiconductor fabrication
TAIWAN SEMICONDUCTOR MFG4 citations59
US6893882B2May 17, 2005
Multivariate RBR tool aging detector
TAIWAN SEMICONDUCTOR MFG2 citations55