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Inventor
KAWABE TAKEHARU
JP
2 patents
⚠️ This page may combine multiple inventors who share the name “KAWABE TAKEHARU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KIRIN BREWERY
1 patent
US7189290B2
Mar 13, 2007
Method and device for cleaning raw material gas introduction tube used in CVD film forming apparatus
KIRIN BREWERY
38 citations
89
MITSUBISHI SHOJI PLASTICS CORP
1 patent
US7603962B2
Oct 20, 2009
Rotary type CVD film forming apparatus for mass production
MITSUBISHI SHOJI PLASTICS CORP
5 citations
57