Inventor

TSUTSUMI KENGO

JP4 patents

⚠️ This page may combine multiple inventors who share the name “TSUTSUMI KENGO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SAMSUNG ELECTRONICS CO LTD

2 patents

US8361274B2Jan 29, 2013

Etching apparatus and etching method

SAMSUNG ELECTRONICS CO LTD6 citations70

US7497963B2Mar 3, 2009

Etching method

SAMSUNG ELECTRONICS CO LTD7 citations70

ULVAC INC

2 patents

US10435783B2Oct 8, 2019

Target assembly

ULVAC INC1 citations59

US7682481B2Mar 23, 2010

Vacuum processing apparatus

ULVAC INC0 citations34