Inventor
WANG ING-YANN ALBERT
US6 patents
Patents
6 patentsUS7476291B2Jan 13, 2009
High chamber temperature process and chamber design for photo-resist stripping and post-metal etch passivation
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US7824519B2Nov 2, 2010
Variable volume plasma processing chamber and associated methods
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US8048329B2Nov 1, 2011
Methods for implementing highly efficient plasma traps
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US7562638B2Jul 21, 2009
Methods and arrangement for implementing highly efficient plasma traps
LAM RES CORP2 citations61
US7554053B2Jun 30, 2009
Corrugated plasma trap arrangement for creating a highly efficient downstream microwave plasma system
LAM RES CORP3 citations61
US7679024B2Mar 16, 2010
Highly efficient gas distribution arrangement for plasma tube of a plasma processing chamber
LAM RES CORP0 citations40