Inventor
Franke Elliott
US7 patents
⚠️ This page may combine multiple inventors who share the name “Franke Elliott”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
4 patentsUS10319637B2Jun 11, 2019
Method for fully self-aligned via formation using a directed self assembly (DSA) process
TOKYO ELECTRON LTD5 citations71
US10748769B2Aug 18, 2020
Methods and systems for patterning of low aspect ratio stacks
TOKYO ELECTRON LTD1 citations60
US10049892B2Aug 14, 2018
Method for processing photoresist materials and structures
TOKYO ELECTRON LTD1 citations50
US9576812B2Feb 21, 2017
Partial etch memorization via flash addition
TOKYO ELECTRON LTD0 citations39