Inventor

STANTON STUART

US3 patents

⚠️ This page may combine multiple inventors who share the name “STANTON STUART”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SVG LITHOGRAPHY SYSTEMS INC

1 patent

US5631721AMay 20, 1997

Hybrid illumination system for use in photolithography

SVG LITHOGRAPHY SYSTEMS INC181 citations96

LUCENT TECHNOLOGIES INC

1 patent

US5596413AJan 21, 1997

Sub-micron through-the-lens positioning utilizing out of phase segmented gratings

LUCENT TECHNOLOGIES INC142 citations95

(unassigned)

1 patent

US5654540AAug 5, 1997

High resolution remote position detection using segmented gratings

40 citations88