Inventor
TSAI TSUNG-LING
TW14 patents
⚠️ This page may combine multiple inventors who share the name “TSAI TSUNG-LING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
13 patentsUS11004794B2May 11, 2021
Partial barrier free vias for cobalt-based interconnects and methods of fabrication thereof
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations84
US11120995B2Sep 14, 2021
Method for forming multi-layer mask
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US12362281B2Jul 15, 2025
Partial barrier free vias for cobalt-based interconnects and methods of fabrication thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12176217B2Dec 24, 2024
Method for manufacturing a semiconductor using slurry
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11776910B2Oct 3, 2023
Partial barrier free vias for cobalt-based interconnects and methods of fabrication thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11756825B2Sep 12, 2023
Semiconductor structure with oxidized ruthenium
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11688607B2Jun 27, 2023
Slurry
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11004691B2May 11, 2021
Mechanism for manufacturing semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10510555B2Dec 17, 2019
Mechanism for manufacturing semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10497574B2Dec 3, 2019
Method for forming multi-layer mask
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10269579B1Apr 23, 2019
Method of manufacturing semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10847410B2Nov 24, 2020
Ruthenium-containing semiconductor structure and method of manufacturing the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10727076B2Jul 28, 2020
Slurry and manufacturing semiconductor using the slurry
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51