Inventor
WANG JIH-HWA
TW4 patents
Patents
4 patentsUS6444541B1Sep 3, 2002
Method for forming lining oxide in shallow trench isolation incorporating pre-annealing step
TAIWAN SEMICONDUCTOR MFG23 citations89
US6372663B1Apr 16, 2002
Dual-stage wet oxidation process utilizing varying H2/O2 ratios
TAIWAN SEMICONDUCTOR MFG21 citations89
US6040238AMar 21, 2000
Thermal annealing for preventing polycide void
TAIWAN SEMICONDUCTOR MFG15 citations69
US7518129B2Apr 14, 2009
Preventing dosage drift with duplicate dose integrators
TAIWAN SEMICONDUCTOR MFG0 citations48