Inventor
FIGUEIRO THIAGO
FR8 patents
⚠️ This page may combine multiple inventors who share the name “FIGUEIRO THIAGO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASELTA NANOGRAPHICS
6 patentsUS10295912B2May 21, 2019
Method for determining the parameters of an IC manufacturing process model
ASELTA NANOGRAPHICS2 citations68
US10578978B2Mar 3, 2020
Method for determining the dose corrections to be applied to an IC manufacturing process by a matching procedure
ASELTA NANOGRAPHICS1 citations56
US10553394B2Feb 4, 2020
Method for the correction of electron proximity effects
ASELTA NANOGRAPHICS1 citations54
US10156796B2Dec 18, 2018
Method for determining the parameters of an IC manufacturing process by a differential procedure
ASELTA NANOGRAPHICS1 citations45
US10522328B2Dec 31, 2019
Method of performing dose modulation, in particular for electron beam lithography
ASELTA NANOGRAPHICS0 citations37
US9934336B2Apr 3, 2018
Method of correcting electron proximity effects using Voigt type scattering functions
ASELTA NANOGRAPHICS0 citations36