Inventor
Sharma Bed
US4 patents
Patents
4 patentsUS9981286B2May 29, 2018
Selective formation of metal silicides
ASM IP HOLDING BV11 citations81
US10892156B2Jan 12, 2021
Methods for forming a silicon nitride film on a substrate and related semiconductor device structures
ASM IP HOLDING BV5 citations70
US10770286B2Sep 8, 2020
Methods for selectively forming a silicon nitride film on a substrate and related semiconductor device structures
ASM IP HOLDING BV3 citations69
US11848200B2Dec 19, 2023
Methods for selectively forming a silicon nitride film on a substrate and related semiconductor device structures
ASM IP HOLDING BV0 citations59