Inventor

YAMA GARY

US64 patents

⚠️ This page may combine multiple inventors who share the name “YAMA GARY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

YAMA GARY

BOSCH GMBH ROBERT

Anti-stiction technique for electromechanical systems and electromechanical device employing same

Tri-axis accelerometer having a single proof mass and fully differential output signals

Microelectromechanical devices and fabrication methods

Dual-axis yaw rate sensing unit having a tuning fork gyroscope arrangement

Microelectromechanical devices and fabrication methods

Trench based capacitive humidity sensor

Resistive MEMS humidity sensor

MEMS device having a getter

Anti-stiction technique for electromechanical systems and electromechanical device employing same

Apparatus for sensing and three dimensional haptic

System and method for utilizing pressure sensors in an electric device

Semiconductor sensor having a suspended structure and method of forming a semiconductor sensor having a suspended structure

Suspension and absorber structure for bolometer

Metamaterial and method for forming a metamaterial using atomic layer deposition

Serpentine IR sensor

Method of etching a device using a hard mask and etch stop layer

Electrochemical sequencing of DNA using an edge electrode

Methods to combine radiation-based temperature sensor and inertial sensor and/or camera output in a handheld/mobile device

Thermally shorted bolometer

Structured gap for a MEMS pressure sensor

Thin-film encapsulated infrared sensor

Bolometer having absorber with pillar structure for thermal shorting

Laser carbonization of polymer coatings in an open-air environment

Multi-ring resonator system and method

Faulty pressure sensor determination of a portable communication device touch display

Epi-poly etch stop for out of plane spacer defined electrode

Method to modulate the sensitivity of a bolometer via negative interference

Bolometer fluid flow and temperature sensor

Portable device with temperature sensing

Epi-poly etch stop for out of plane spacer defined electrode

Resistive switching for MEMS devices

Portable device with temperature sensing

Out-of-plane spacer defined electrode

MEMS infrared sensor including a plasmonic lens

Passivation layer for harsh environments and methods of fabrication thereof

Anisotropic conductor and method of fabrication thereof

Multi-stack film bolometer

Method of manufacturing a sensor device having a porous thin-film metal electrode

Wafer with spacer including horizontal member

Wafer with recessed plug

YAMA GARY

Device formed using a hard mask and etch stop layer

Atomic layer deposition strengthening members and method of manufacture

Method of epitaxially growing piezoresistors

PAN ZHIYU

Tri-axis accelerometer having a single proof mass and fully differential output signals

Tri-axis accelerometer having a single proof mass and fully differential output signals

GRAHAM ANDREW B

Method of forming membranes with modified stress characteristics

Out-of-plane spacer defined electrode

CHEN PO-JUI

Substrate with multiple encapsulated devices

Method of manufacturing a planar electrode with large surface area

UNIV LELAND STANFORD JUNIOR

In-plane mechanically coupled microelectromechanical tuning fork resonators