Inventor
ZIEMINS ULDIS ARTIS
US5 patents
Patents
5 patentsUS6467120B1Oct 22, 2002
Wafer cleaning brush profile modification
IBM55 citations94
US5828481AOct 27, 1998
Mid-objective laser scanner
IBM21 citations89
US5754328AMay 19, 1998
Mid-objective laser scanner
IBM25 citations89
US5926311AJul 20, 1999
Illumination/viewing system for features in transparent materials
IBM8 citations68
US5777798AJul 7, 1998
Variable magnification laser imaging system
IBM2 citations50