Inventor

BUKOFSKY SCOTT

US2 patents

⚠️ This page may combine multiple inventors who share the name “BUKOFSKY SCOTT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

INFINEON TECHNOLOGIES AG

1 patent

US7413833B2Aug 19, 2008

Single exposure of mask levels having a lines and spaces array using alternating phase-shift mask

INFINEON TECHNOLOGIES AG9 citations82

IBM

1 patent

US7171034B2Jan 30, 2007

Method and system for phase/amplitude error detection of alternating phase shifting masks in photolithography

IBM14 citations80