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Inventor
VARTABEDIAN ARA
US
3 patents
⚠️ This page may combine multiple inventors who share the name “VARTABEDIAN ARA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAINT GOBAIN CERAMICS
2 patents
US6982125B2
Jan 3, 2006
ALN material and electrostatic chuck incorporating same
SAINT GOBAIN CERAMICS
14 citations
81
US7369393B2
May 6, 2008
Electrostatic chucks having barrier layer
SAINT GOBAIN CERAMICS
10 citations
77
PUJARI VIMAL K
1 patent
US8334062B1
Dec 18, 2012
Environmental barrier coating
PUJARI VIMAL K
9 citations
76