Inventor
MURAMATSU KOUJI
JP5 patents
⚠️ This page may combine multiple inventors who share the name “MURAMATSU KOUJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MURAMATSU KOUJI
4 patentsUS8144308B2Mar 27, 2012
Spatial light modulation unit, illumination optical apparatus, exposure apparatus, and device manufacturing method
MURAMATSU KOUJI18 citations86
US8908151B2Dec 9, 2014
Illumination optical system, exposure apparatus, device manufacturing method, compensation filter, and exposure optical system
MURAMATSU KOUJI4 citations67
US8953147B2Feb 10, 2015
Spatial light modulation unit, illumination optical apparatus, exposure apparatus, and device manufacturing method
MURAMATSU KOUJI3 citations56
US8223318B2Jul 17, 2012
Illuminating optical apparatus, exposure apparatus and device manufacturing method
MURAMATSU KOUJI0 citations37