Inventor
MASADA AYUMI
JP3 patents
Patents
3 patentsUS10872768B2Dec 22, 2020
Method of manufacturing epitaxial silicon wafer, epitaxial silicon wafer, and method of manufacturing solid-state image sensing device
SUMCO CORP2 citations62
US10935510B2Mar 2, 2021
Method of measuring carbon concentration of silicon sample, method of manufacturing silicon single crystal ingot, silicon single crystal ingot and silicon wafer
SUMCO CORP0 citations56
US10676840B2Jun 9, 2020
Method of evaluating manufacturing process of silicon material and manufacturing method of silicon material
SUMCO CORP0 citations36