Inventor
ITO JOYO
JP6 patents
Patents
6 patentsUS11600510B2Mar 7, 2023
Electrostatic chuck heater
NGK INSULATORS LTD3 citations67
US12243729B2Mar 4, 2025
Member for semiconductor manufacturing apparatus and method for manufacturing the same
NGK INSULATORS LTD0 citations59
US11784068B2Oct 10, 2023
Member for semiconductor manufacturing apparatus and method for manufacturing the same
NGK INSULATORS LTD0 citations59
US12120783B2Oct 15, 2024
Ceramic heater
NGK INSULATORS LTD0 citations50
US12238826B2Feb 25, 2025
Semiconductor-manufacturing apparatus member and method of manufacturing the same
NGK INSULATORS LTD0 citations49
US11784078B2Oct 10, 2023
Wafer placement apparatus
NGK INSULATORS LTD0 citations46