Inventor
LIN JENN-TARNG
TW14 patents
Patents
14 patentsUS5876508AMar 2, 1999
Method of cleaning slurry remnants after the completion of a chemical-mechanical polish process
UNITED MICROELECTRONICS CORP73 citations94
US6048788AApr 11, 2000
Method of fabricating metal plug
UNITED MICROELECTRONICS CORP33 citations92
US5883014AMar 16, 1999
Method for treating via sidewalls with hydrogen plasma
UNITED MICROELECTRONICS CORP61 citations92
US5716888AFeb 10, 1998
Stress released VLSI structure by void formation
UNITED MICROELECTRONICS CORP25 citations90
US5466627ANov 14, 1995
Stacked capacitor process using BPSG precipitates
UNITED MICROELECTRONICS CORP20 citations88
US6146742ANov 14, 2000
Barrier/glue layer on polysilicon layer
UNITED MICROELECTRONICS CORP12 citations73
US6030892AFeb 29, 2000
Method of preventing overpolishing in a chemical-mechanical polishing operation
UNITED MICROELECTRONICS CORP8 citations73
US5990004ANov 23, 1999
Method for forming a tungsten plug and a barrier layer in a contact of high aspect ratio
UNITED MICROELECTRONICS CORP10 citations73
US5897373AApr 27, 1999
Method of manufacturing semiconductor components having a titanium nitride layer
UNITED MICROELECTRONICS CORP7 citations73
US6225222B1May 1, 2001
Diffusion barrier enhancement for sub-micron aluminum-silicon contacts
UNITED MICROELECTRONICS CORP11 citations71
US6093639AJul 25, 2000
Process for making contact plug
UNITED MICROELECTRONICS CORP7 citations71
US5950108ASep 7, 1999
Method of fabricating a conductive plug
UNITED MICROELECTRONICS CORP15 citations71
US5883004AMar 16, 1999
Method of planarization using interlayer dielectric
UNITED MICROELECTRONICS CORP8 citations69
US5292680AMar 8, 1994
Method of forming a convex charge coupled device
UNITED MICROELECTRONICS CORP4 citations62