Inventor
PATEL NAINESH J
US7 patents
Patents
7 patentsUS6365493B1Apr 2, 2002
Method for antimony and boron doping of spherical semiconductors
BALL SEMICONDUCTOR INC16 citations81
US6074476AJun 13, 2000
Non-contact processing of crystal materials
BALL SEMICONDUCTOR INC17 citations81
US6432330B1Aug 13, 2002
Jet system for spherical shape devices
BALL SEMICONDUCTOR INC13 citations71
US6426280B2Jul 30, 2002
Method for doping spherical semiconductors
BALL SEMICONDUCTOR INC7 citations71
US6331477B1Dec 18, 2001
Doping of spherical semiconductors during non-contact processing in the liquid state
BALL SEMICONDUCTOR INC8 citations71
US6264742B1Jul 24, 2001
Single crystal processing by in-situ seed injection
BALL SEMICONDUCTOR INC9 citations71
US6383287B1May 7, 2002
System and method for performing diffusion on a three-dimensional substrate
BALL SEMICONDUCTOR INC0 citations48